Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch/nano13: Difference between revisions

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{| {{table}}
|+ After 60 seconds
| align="center" style="background:#f0f0f0;"|'''Nominal trench line width'''
| align="center" style="background:#f0f0f0;"|''''''
| align="center" style="background:#f0f0f0;"|'''30'''
| align="center" style="background:#f0f0f0;"|'''60'''
| align="center" style="background:#f0f0f0;"|'''90'''
| align="center" style="background:#f0f0f0;"|'''120'''
| align="center" style="background:#f0f0f0;"|'''150'''
| align="center" style="background:#f0f0f0;"|'''Avg'''
| align="center" style="background:#f0f0f0;"|'''Std'''
|-
| ER||nm/min||241||285||307||325||335||299||37
|-
| SA||degs||92||92||92||91||91||92||0
|-
| base||nm/edge||-5||-8||-18||-18||-34||-17||11
|-
| foot||nm/edge||-5||-8||-18||-18||-4||-10||7
|-
| Bowing||||19||11||11||14||10||13||4
|-
| Curve||||-48||-46||-43||-40||-40||-44||4
|-
| zep||nm/min||||||||||||95||
|-
|
|}
{| {{table}}
|+ After 120 seconds
| align="center" style="background:#f0f0f0;"|'''Nominal trench line width'''
| align="center" style="background:#f0f0f0;"|''''''
| align="center" style="background:#f0f0f0;"|'''30'''
| align="center" style="background:#f0f0f0;"|'''60'''
| align="center" style="background:#f0f0f0;"|'''90'''
| align="center" style="background:#f0f0f0;"|'''120'''
| align="center" style="background:#f0f0f0;"|'''150'''
| align="center" style="background:#f0f0f0;"|'''Average'''
| align="center" style="background:#f0f0f0;"|'''Std. dev.'''
|-
| ER||nm/min||189||195||229||241||242||219||25
|-
| SA||degs||95||93||93||93||94||94||1
|-
| base||nm/edge||0||4||-6||-26||-34||-13||17
|-
| foot||nm/edge||5||16||6||-12||-7||2||12
|-
| Bowing||||27||12||30||22||30||24||7
|-
| Curve||||-56||-54||-45||-40||-45||-48||7
|-
| zep||nm/min||||||||||||81||
|-
|
|}

Revision as of 13:30, 10 May 2011

The nano1.3 recipe

Recipe nano1.3
Recipe Gas C4F8 38 sccm, SF6 52 sccm
Pressure 4 mTorr, Strike 3 secs @ 15 mTorr
Power 600 W CP, 40 W PP
Temperature -10 degs
Hardware 100 mm Spacers
Time 60 secs (a) and 120 secs (b)
Conditions Run ID (a) 1856 and (b) 1856+1857
Conditioning Sequence: Oxygen clean, processes, no oxygen between runs
Mask 211 nm zep etched down 117 nm


After 60 seconds
Nominal trench line width ' 30 60 90 120 150 Avg Std
ER nm/min 241 285 307 325 335 299 37
SA degs 92 92 92 91 91 92 0
base nm/edge -5 -8 -18 -18 -34 -17 11
foot nm/edge -5 -8 -18 -18 -4 -10 7
Bowing 19 11 11 14 10 13 4
Curve -48 -46 -43 -40 -40 -44 4
zep nm/min 95


After 120 seconds
Nominal trench line width ' 30 60 90 120 150 Average Std. dev.
ER nm/min 189 195 229 241 242 219 25
SA degs 95 93 93 93 94 94 1
base nm/edge 0 4 -6 -26 -34 -13 17
foot nm/edge 5 16 6 -12 -7 2 12
Bowing 27 12 30 22 30 24 7
Curve -56 -54 -45 -40 -45 -48 7
zep nm/min 81