Jump to content

Specific Process Knowledge/Lithography/Development/Developer TMAH UV-lithography processing: Difference between revisions

Taran (talk | contribs)
Mmat (talk | contribs)
Line 98: Line 98:


Multiple puddle:
Multiple puddle:
*'''(10??) DCH 100mm MP 3x60s'''
*'''(1019) DCH 100mm MP 3x60s'''
*'''(1010) DCH 100mm MP 4x60s'''
*'''(1010) DCH 100mm MP 4x60s'''
*'''(1012) DCH 100mm MP 5x60s'''
*'''(1012) DCH 100mm MP 5x60s'''