Specific Process Knowledge/Thin film deposition/Deposition of Silicon Oxide: Difference between revisions

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	'''*''' If you wish to deposit more than ~~100~~ nm, please talk to responsible staff or write to thinfilm@nanolab.dtu.dk		'''*''' If you wish to deposit more than 200 nm, please talk to responsible staff or write to thinfilm@nanolab.dtu.dk