Specific Process Knowledge/Etch/Aluminum Oxide: Difference between revisions
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'''All links to Kemibrug (SDS) and Labmanager Including APV and QC requires login.''' | '''All links to Kemibrug (SDS) and Labmanager Including APV and QC requires login.''' | ||
'''Feedback to this page''': '''[mailto:labadviser@ | '''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/Specific_Process_Knowledge/Etch/Aluminum_Oxide click here]''' | ||
Etching Al<sub>2</sub>O<sub>3</sub> can be done both chemically (wet) and by dry etching. | Etching Al<sub>2</sub>O<sub>3</sub> can be done both chemically (wet) and by dry etching. | ||