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<!--Page reviewed by jmli 1/8-2016  -->
<!--Page reviewed by jmli 1/8-2016  -->
==Etching of Titanium==
==Etching of Titanium==
 
*Etching af Lithium niobate is new to DTU Nanolab. There are some users doing it on the IBE and the ASE. We do not have any results we can show.
Etching of titanium can be done either by wet etch, dry etch or by sputtering with ions.
*[[Specific Process Knowledge/Etch/Wet Titanium Etch|Etching of Ti by wet etch]]
*[[Specific Process Knowledge/Etch/ICP Metal Etcher/Titanium|Etching of Ti by dry etch]]
*[[Specific_Process_Knowledge/Etch/IBE&frasl;IBSD Ionfab 300/IBE Ti etch|Sputtering of Ti]]
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==Comparison of Titanium Etch Methodes==
==Comparison of Lithium niobate Etch Methods==


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