Specific Process Knowledge/Etch/Etching of Silicon Nitride: Difference between revisions
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![[Specific Process Knowledge/Etch/Wet Silicon Oxide Etch (BHF)|BHF]] | ![[Specific Process Knowledge/Etch/Wet Silicon Oxide Etch (BHF)|BHF]] | ||
!Pegasus 4 | !Pegasus 4 | ||
![[index.php?title=Specific Process Knowledge/Etch/AOE (Advanced Oxide Etch)|AOE (Advanced Oxide Etch)]] | |||
![[Specific Process Knowledge/Etch/ASE_(Advanced_Silicon_Etch)|ASE]] | ![[Specific Process Knowledge/Etch/ASE_(Advanced_Silicon_Etch)|ASE]] | ||
![[Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300|IBE/IBSD Ionfab 300]] | ![[Specific Process Knowledge/Etch/IBE⁄IBSD Ionfab 300|IBE/IBSD Ionfab 300]] | ||
![[Specific Process Knowledge/Etch/ICP Metal Etcher|ICP Metal]] | ![[Specific Process Knowledge/Etch/ICP Metal Etcher|ICP Metal]] | ||
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*Anisotropic etch: vertical sidewalls | *Anisotropic etch: vertical sidewalls | ||
* | *Deep etch | ||
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*Anisotropic etch: vertical sidewalls | *Anisotropic etch: vertical sidewalls | ||
* | *Primarily for samples with small amounts of metal | ||
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*Primarily for pure physical etch by sputtering with Ar-ions | *Primarily for pure physical etch by sputtering with Ar-ions | ||
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*Silicon Nitride | *Silicon Nitride | ||
*Aluminium | *Aluminium | ||
* | *Chromium (if needed) | ||
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*Photoresist | *Photoresist | ||
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*Silicon Nitride | *Silicon Nitride | ||
*Aluminium | *Aluminium | ||
* | *Metals if they cover less than 5% of the wafer area | ||
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*Any material that is accepted in the machine | *Any material that is accepted in the machine | ||
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*Process dependent. | *Process dependent. | ||
*From 0 to ~300 nm/min | *From 0 to ~300 nm/min | ||
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*Process dependent. | |||
*from 0 to ~500 nm/min | |||
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*Probably between 20-300 nm/min depending on the process parameters | *Probably between 20-300 nm/min depending on the process parameters | ||
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*Process dependent. | *Process dependent. | ||
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*<nowiki>#</nowiki>1 100 mm wafer if bonded on a 150 mm wafer | *<nowiki>#</nowiki>1 100 mm wafer if bonded on a 150 mm wafer | ||
*#1 150 mm wafer | *#1 150 mm wafer | ||
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*As many small samples as can be fitted on a 100mm wafer | |||
*<nowiki>#</nowiki>1 50 mm wafer fitted on a 100mm wafer | |||
*<nowiki>#</nowiki>1 100 mm wafer | |||
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*As many small samples as can be fitted on the 100mm carrier (bad/no cooling!) | *As many small samples as can be fitted on the 100mm carrier (bad/no cooling!) | ||
*<nowiki>#</nowiki>1 100mm wafer (or smaller with carrier) | *<nowiki>#</nowiki>1 100mm wafer (or smaller with carrier) | ||
*<nowiki>#</nowiki>1 150mm wafer (only when the system is set up for 150mm) | *<nowiki>#</nowiki>1 150mm wafer (only when the system is set up for 150mm) | ||
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*As many samples as can be securely fitted on a up to 200mm wafer | *As many samples as can be securely fitted on a up to 200mm wafer | ||
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*E-beam resists | *E-beam resists | ||
*DUV resists | *DUV resists | ||
* | *Aluminium | ||
*Chromium (only for masking and on the back side if fused silica) | |||
*Quartz/fused silica | *Quartz/fused silica | ||
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*E-beam resists | *E-beam resists | ||
*DUV resists | *DUV resists | ||
* | *Other metals if they cover less than 5% of the wafer area | ||
*Quartz/fused silica | *Quartz/fused silica | ||
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