Specific Process Knowledge/Etch/Etching of Silicon Oxide: Difference between revisions
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*Isotropic etch | *Isotropic etch | ||
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*Anisotropic etch: vertical sidewalls. | *Anisotropic etch: vertical sidewalls. | ||
*Primarily for samples with small amounts of metals on. | |||
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*Anisotropic etch: vertical sidewalls | *Anisotropic etch: vertical sidewalls | ||
* | *Primarily for III-V samples | ||
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*Anisotropic etch: vertical sidewalls | *Anisotropic etch: vertical sidewalls | ||
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*Primarily for pure physical etch by sputtering with Ar-ions | *Primarily for pure physical etch by sputtering with Ar-ions | ||
*Also for slanted gratings | |||
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*Gas phase HF etching with ethanol as carrier | *Gas phase HF etching with ethanol as carrier | ||