Specific Process Knowledge/Etch/Etching of Silicon Oxide: Difference between revisions
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*Isotropic etch | *Isotropic etch | ||
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*Anisotropic etch: vertical sidewalls | *Anisotropic etch: vertical sidewalls. Should mainly be used for samples with small amounts of metals on. | ||
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*Anisotropic etch: vertical sidewalls | *Anisotropic etch: vertical sidewalls | ||