Specific Process Knowledge/Lithography/Aligners/Aligner: Maskless 04 processing: Difference between revisions

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 '''Raster mode'''
-The pixel-size of the DMD in the Aligner: Maskless 01 is 0.5µm X 0.5µm (at the sample surface). The lithographic resolution of the machine is 1µm on paper, which was demonstrated in the acceptance test after installation using a resist thickness of 0.5µm. This result has later been confirmed. In 1.5µm thick resist, the resolution is around 2µm.
+The pixel-size of the DMD in the Aligner: Maskless 04 is 0.5µm X 0.5µm (at the substrate surface). The resolution specification of the machine is 1µm minimum feature size and 1.5µm minimum lines and spaces, which was demonstrated in the factory acceptance test and the site acceptance test after installation using a resist thickness of 0.5µm. In 1.5µm thick resist, the resolution is expected to be around 2µm.
 '''Vector mode'''
+The smallest pinhole in the Aligner: Maskless 04 is 1µm. The resolution specification of the machine is 1µm minimum feature size, which was demonstrated in the factory acceptance test using a resist thickness of 0.5µm.
 =Substrate positioning=