Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions
| Line 157: | Line 157: | ||
|180 | |180 | ||
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| Etch rates (nm/min) | ! colspan="14" align="center"| Etch rates (nm/min) | ||
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| Averages||311||104||92||105||116||169||108||79||101||66||91||98||59 | | Averages||311||104||92||105||116||169||108||79||101||66||91||98||59 | ||
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| Std. Dev||44||15||15||21||22||9||11||31||29||4||28||18||12 | | Std. Dev||44||15||15||21||22||9||11||31||29||4||28||18||12 | ||
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| Sidewall angle (degrees) | ! colspan="14" align="center"| Sidewall angle (degrees) | ||
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| Averages||82||82||82||82||82||84||81||83||83||85||80||83||79 | | Averages||82||82||82||82||82||84||81||83||83||85||80||83||79 | ||
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| Std. Dev||2||2||1||1||1||1||1||2||2||1||3||2||2 | | Std. Dev||2||2||1||1||1||1||1||2||2||1||3||2||2 | ||
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| CD loss (nm pr edge) | ! colspan="14" align="center"| CD loss (nm pr edge) | ||
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| Averages||65||-11||-15||-2||-11||67||63||-29||-5||-29||10||-14||-17 | | Averages||65||-11||-15||-2||-11||67||63||-29||-5||-29||10||-14||-17 | ||
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| Std. Dev||30||5||2||4||3||29||27||6||5||8||7||8||10 | | Std. Dev||30||5||2||4||3||29||27||6||5||8||7||8||10 | ||
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| Bowing (nm) | ! colspan="14" align="center"| Bowing (nm) | ||
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| Averages||31||31||15||6||5||22||12||15||28||13||25||1||-2 | | Averages||31||31||15||6||5||22||12||15||28||13||25||1||-2 | ||
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| Std. Dev||6||7||3||6||4||5||2||6||9||7||5||2||2 | | Std. Dev||6||7||3||6||4||5||2||6||9||7||5||2||2 | ||
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| Botton curvature | ! colspan="14" align="center"| Botton curvature | ||
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| Averages||-9||-6||-9||-11||-9||9||-4||-8||-24||-2||-9||-13||-10 | | Averages||-9||-6||-9||-11||-9||9||-4||-8||-24||-2||-9||-13||-10 | ||