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Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions

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Bureaucrats, danchip, Administrators
1,918 edits
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| Etch rates (nm/min)||||||||||||||||||||||||||
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| Averages||311||104||92||105||116||169||108||79||101||66||91||98||59
| Averages||311||104||92||105||116||169||108||79||101||66||91||98||59
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