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Deposition of SiN with PECVD4/NEW TESTS QC: Difference between revisions

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=== Data with HF generator=100W ===
=== Data with HF generator=100W ===
[[File:100W - thickness QC nitride.png|left|thumb|435x435px|Data from november to february of 15min QC nitride using 100W. The graph showcases thickness with standard error across time.]]
 
 
 
 
 
 
 
[[File:100W - thickness QC nitride.png|left|Data from november to february of 15min QC nitride using 100W. The graph showcases thickness with standard error across time.|frame]]
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