Deposition of SiN with PECVD4/NEW TESTS QC: Difference between revisions
No edit summary |
No edit summary |
||
| Line 8: | Line 8: | ||
=== Data with HF generator=25W === | === Data with HF generator=25W === | ||
[[File:25W - thickness PECVD4 nitride QC.png|left|thumb|343x343px|Data from november to february of 15min QC nitride using 25W. The | [[File:25W - thickness PECVD4 nitride QC.png|left|thumb|343x343px|Data from november to february of 15min QC nitride using 25W. The graph showcases thickness with standard error across time.]] | ||
[[File:25W - Thickness filmtek vs ellipsometer.png|thumb| | [[File:25W - Thickness filmtek vs ellipsometer.png|thumb|351x351px|Wafers had the thickness measured in both Filmtek and Ellipsometer, comparing the results.]] | ||
| Line 21: | Line 19: | ||
[[File:25W - refractive index QC nitride.png|left|thumb|345x345px|Data from november to february of 15min QC nitride using 25W. The graph showcases the refractive index with standard error across time.]] | |||
[[File:25W - refractive index filmtek vs ellipsometer.png|thumb|353x353px|Wafers had the refractive index measured in both Filmtek and Ellipsometer, comparing the results.]] | |||
=== Data with HF generator=100W === | === Data with HF generator=100W === | ||