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Deposition of SiN with PECVD4/NEW TESTS QC: Difference between revisions

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=== Data with HF generator=25W ===
=== Data with HF generator=25W ===
[[File:25W - thickness PECVD4 nitride QC.png|left|thumb|568x568px|Data from november to february of 15min QC nitride using 25W. The grapgh showcases thickness with standard error across time.]]
[[File:25W - thickness PECVD4 nitride QC.png|left|thumb|343x343px|Data from november to february of 15min QC nitride using 25W. The grapgh showcases thickness with standard error across time.]]
[[File:25W - Thickness filmtek vs ellipsometer.png|thumb|350x350px|Wafers had the thickness measured in both filmtek and ellipsometer, comparing the results.]]
 
 
 




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