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Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions

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Line 188: Line 188:
|18
|18
|12
|12
|-
! colspan="15" align="center"| Sidewall angle (degrees)
! colspan="15" align="center"| Sidewall angle (degrees)
|-
|-
! Averages
! Averages
|82 | | 82 | 82 | 82 | 82 | 84 | 81 | 83 | 83 | 85
|82
2 | | 2 | 1 | 1 | 1 | 1 | 1 | 2 | 2 | 1
|82
 
|82
 
|82
|82
|84
|81
|83
|83
|85
|80
|83
|79
|-
! Std. Dev
|2
|2
|1
|1
|1
|1
|1
|2
|2
|1
|3
|2
|2
|-
|-
! colspan="15" align="center"| CD loss (nm pr edge)
|-
! Averages
|65
|-11
|-15
|-2
|-11
|67
|63
|-29
|-5
|-29
|10
|-14
|-17
|-
! Std. Dev
|30
|5
|2
|4
|3
|29
|27
|6
|5
|8
|7
|8
|10
|-
|}
|}


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