Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions
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|12 | |12 | ||
! colspan="15" align="center"| Sidewall angle (degrees) | |||
|- | |- | ||
! Averages | |||
|82 | | 82 | 82 | 82 | 82 | 84 | 81 | 83 | 83 | 85 | |||
2 | | 2 | 1 | 1 | 1 | 1 | 1 | 2 | 2 | 1 | |||
|} | |} | ||