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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
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Jehem (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
1,716 edits
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The plasma asher is equipped with 2 gaslines: oxygen and nitrogen, but all standard processes use only oxygen (as recommended by Diener).
The plasma asher is equipped with 2 gaslines: oxygen and nitrogen, but all standard processes use only oxygen (as recommended by Diener).


'''Process parameters'''<br>
You can manipulate two different descum process development parameters: you can either change power or chamber pressure.


'''Ashing of  AZ MiR701 resist:'''<br>
==Power setting testing==
You can use two different descum process developments: you can either change power settings or processing chamber pressure.
 
 
'''Testing different power settings:'''
[[image:AZMIR701_power_settings.png|400px|thumb|Descum results for different power settings]]
[[image:AZMIR701_power_settings.png|400px|thumb|Descum results for different power settings]]


'''Recipe settings:'''
'''Recipe settings:'''
*Resist: AZ MiR 701
*O2 flow: 5 sccm
*O2 flow: 5 sccm
*N2 flow: 0
*N2 flow: 0
Line 38: Line 37:
*Power: Varied
*Power: Varied


 
{| class="wikitable" style="text-align: center;"
'''Experiment parameters:'''
|+ style="caption-side: top; text-align: left;" | Experiment parameters
{| {{table}}
|-
| align="center" |
!  !! Forward/reverse !! C2/C1 !! Power
{|border="1" cellspacing="1" cellpadding="10" style="text-align:left;"  
|- style="background:LightGrey"
| ||FW/REV|| C2/C1 || Power
|-
|'''recipe 1''' || 50/0 || 52/31 || 50%
|-
|-
|'''recipe 2''' || 100/0 || 53/31 || 100%
| style="text-align: left;" | '''recipe 1''' || 50/0 || 52/31 || 50%
|-
|-
|'''recipe 3''' || 20/0 || 51/34 || 20%
| style="text-align: left;" | '''recipe 2''' || 100/0 || 53/31 || 100%
|-
|-
| style="text-align: left;" | '''recipe 3''' || 20/0 || 51/34 || 20%
|}
|}
|}
<br clear="all" />
<hr>


'''Testing different pressure settings:'''
==Pressure setting testing==
[[image:AZMIR701_pressure_settings.png|400px|thumb|Descum results for different pressure settings]]
[[image:AZMIR701_pressure_settings.png|400px|thumb|Descum results for different pressure settings]]


'''Recipe settings:'''
'''Recipe settings:'''
*Resist: AZ MiR 701
*O2 flow: varied
*O2 flow: varied
*N2 flow: 0
*N2 flow: 0
Line 67: Line 59:
*Power: V100% (100 W)
*Power: V100% (100 W)


 
{| class="wikitable" style="text-align: center;"
'''Experiment parameters:'''
|+ style="caption-side: top; text-align: left;" | Experiment parameters
{| {{table}}
|-
| align="center" |
!  !! Forward/reverse !! C2/C1 !! Oxygen !! Pressure
{|border="1" cellspacing="1" cellpadding="10" style="text-align:left;"  
|- style="background:LightGrey"
| ||FW/REV|| C2/C1 || Oxygen || Pressure
|-
|'''recipe 1'''|| 100/0 || 53/31 || 5 || 0,2
|-
|-
|'''recipe 2''' || 100/0 || 37/38 || 45 || 0,8
| style="text-align: left;" | '''recipe 1''' || 100/0 || 52/31 || 5 || 0.2
|-
|-
| style="text-align: left;" | '''recipe 2''' || 100/0 || 37/38 || 45 || 0.8
|}
|}
|}
<br clear="all" />
<hr>


'''Ashing of AZ5214E resist:'''
==Ashing of AZ 5214E resist==
[[image:AZ5214E_pressure_settings.png|400px|thumb|Descum results for different pressure settings]]
[[image:AZ5214E_pressure_settings.png|400px|thumb|Descum results for different pressure settings]]


'''Recipe settings:'''
'''Recipe settings:'''
*Resist: AZ 5214E
*O2 flow: varied
*O2 flow: varied
*N2 flow: 0
*N2 flow: 0
Line 95: Line 79:
*Power: V100% (100 W)
*Power: V100% (100 W)


 
{| class="wikitable" style="text-align: center;"
'''Experiment parameters:'''
|+ style="caption-side: top; text-align: left;" | Experiment parameters
{| {{table}}
|-
| align="center" |
!  !! Forward/reverse !! C2/C1 !! Oxygen !! Pressure
{|border="1" cellspacing="1" cellpadding="10" style="text-align:left;"  
|- style="background:LightGrey"
| ||FW/REV|| C2/C1 || Oxygen || Pressure
|-
|'''recipe 1'''|| 100/0 || 53/31 || 17 || 0,4
|-
|-
|'''recipe 2''' || 100/0 || 37/39 || 45 || 0,8
| style="text-align: left;" | '''recipe 1''' || 100/0 || 52/31 || 17 || 0.4
|-
|-
| style="text-align: left;" | '''recipe 2''' || 100/0 || 37/39 || 45 || 0.8
|}
|}
|}
 
<br clear="all" />
<br clear="all" />


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