Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions
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! colspan="14" align="center"| Etch rates (nm) | |||
! Averages | |||
|- | |||
| 311 | |||
| 104 | |||
| 92 | |||
| 105 | |||
| 116 | |||
| 169 | |||
| 108 | |||
| 79 | |||
| 101 | |||
| 66 | |||
| 91 | |||
| 98 | |||
| 59 | |||
|- | |- | ||
|} | |} | ||