Specific Process Knowledge/Lithography/Descum: Difference between revisions
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'''Testing different power settings:''' | '''Testing different power settings:''' | ||
[[image:AZMIR701_power_settings.png| | [[image:AZMIR701_power_settings.png|400px|thumb|Descum results for different power settings]] | ||
'''Recipe settings:''' | '''Recipe settings:''' | ||
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'''Testing different pressure settings:''' | '''Testing different pressure settings:''' | ||
[[image:AZMIR701_pressure_settings.png| | [[image:AZMIR701_pressure_settings.png|400px|thumb|Descum results for different pressure settings]] | ||
'''Recipe settings:''' | '''Recipe settings:''' | ||
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'''Ashing of AZ5214E resist:''' | '''Ashing of AZ5214E resist:''' | ||
[[image:AZ5214E_pressure_settings.png| | [[image:AZ5214E_pressure_settings.png|400px|thumb|Descum results for different pressure settings]] | ||