Specific Process Knowledge/Lithography/Strip: Difference between revisions
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The user manual, risk assessment, and contact information can be found in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=530 LabManager] - '''requires login''' | The user manual, risk assessment, and contact information can be found in [http://labmanager.dtu.dk/function.php?module=Machine&view=view&mach=530 LabManager] - '''requires login''' | ||
'''Typical | '''Typical stripping parameters'''<br> | ||
Tested with 1.5 µm AZ 5214E on 100 mm silicon substrate. | |||
*O<sub>2</sub>: 100 sccm | *O<sub>2</sub>: 100 sccm | ||
*N<sub>2</sub>: 100 sccm | *N<sub>2</sub>: 100 sccm | ||