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Specific Process Knowledge/Lithography/Descum: Difference between revisions

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DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
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Jehem (talk | contribs)
DCH-Employees-701, NLAB-Employees-701, NLAB-LabmanagerAllUsers, danchip
1,931 edits
Line 216: Line 216:
| Film thickness range, before descum [nm]: || 11 || 13 || 11 || 12 || 14
| Film thickness range, before descum [nm]: || 11 || 13 || 11 || 12 || 14
|-
|-
| Post-ashing non-uniformity [%]: || 0.37 || 0.43 || 0.37 || 0.40 || 0.46
| Pre-ashing non-uniformity [%]: || 0.37 || 0.43 || 0.37 || 0.40 || 0.46
|-
|-
| Film thickness range, after descum [nm]: || 11 || 9 || 10 || 12 || 21
| Film thickness range, after descum [nm]: || 11 || 9 || 10 || 12 || 21
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