Specific Process Knowledge/Etch/ICP Metal Etcher: Difference between revisions
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{| border="2" cellspacing="1" cellpadding="3" align="center" | |||
! Nominal line width | ! Nominal line width | ||
! colspan="14" align="center"| Etched depths (nm) | ! colspan="14" align="center"| Etched depths (nm) | ||