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Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch: Difference between revisions

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The nanoetch
The nanoetch
{| {{table}}
| align="center" style="background:#f0f0f0;"|''''''
| align="center" style="background:#f0f0f0;"|'''ER'''
| align="center" style="background:#f0f0f0;"|'''SA'''
| align="center" style="background:#f0f0f0;"|'''base'''
| align="center" style="background:#f0f0f0;"|'''foot'''
| align="center" style="background:#f0f0f0;"|'''Bowing'''
| align="center" style="background:#f0f0f0;"|'''Curve'''
|-
| ||nm/min||degs||nm/edge||nm/edge||||
|-
| 30||236||84,37759937||28||28||21||-30
|-
| 60||307||82,39788067||46||46||32||-27
|-
| 90||333||82,87498365||62||62||35||-18
|-
| 120||341||81,25383774||88||88||33||14
|-
| 150||339||80,29807321||103||103||36||16
|-
| Avg||311||82||65||65||31||-9
|-
| Std||44||2||30||30||6||22
|-
| zep||0||||||||||
|-
|
|}