Specific Process Knowledge/Lithography/Strip: Difference between revisions

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 ==Comparison of ashing rate between substrate sizes for plasma asher 4 & 5==
-[[File:PA_comparison_v2.png|400px|thumb|Comparison of ashing rate with different sibstrate sizes. Process was done using a single substrate placed in the middle of the glass boat, which was placed in the center of the chamber.|right]]
+[[File:PA_comparison_v3.png|400px|thumb|Comparison of ashing rate with different substrate sizes. Process was done using a single substrate placed in the middle of the glass boat, which was placed in the center of the chamber.|right]]
-The ashing rate is slightly higher for 100 mm substrates, but there is no difference between a 150 mm wafer and a 200 mm wafer.
+The ashing rate is highest for 100 mm substrates, lower for 150 mm substrates and even lower for 200 mm substrates.
-All substrate sizes seems to follow the same pattern; ashing rate increases with a higher percentage nitrogen in the gas mix and also with a higher chamber pressure. The total gas flow has only little influence on the ashing rate, but slightly favors the lower flow rate of 200 sccm, similar to previous experiment results.
+All substrate sizes follows the same pattern:
+*Ashing rate increases with a higher percentage nitrogen in the gas mix
+*Ashing rate increases with a higher chamber pressure
+*The total gas flow has only little influence on the ashing rate, but <i>slightly</i> favors the lower flow rate of 200 sccm, similar to previous experiment results
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 '''Process parameter impact on ashing rate'''<br>
-Looking at ashing rate, using linear regression models on the process parameters, indicates that the gas mix and the chamber pressure has a significant impact on the ashing rate, while the gas flow has only little effect:
+Investigating the ashing rate using linear regression models on the process parameters, indicates that the gas mix and the chamber pressure has a significant impact on the ashing rate, while the gas flow has only little effect:
 <gallery mode="packed-hover" heights="150">
 ParamEffect_100_mm_v1.png|100 mm process parameter impact