Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch/nano142: Difference between revisions
New page: == The nano1.42 recipe == {| border="2" cellpadding="2" cellspacing="1" |+ '''Recipe nano1.42''' |- ! rowspan="6" align="center"| Recipe | Gas | C<sub>4</sub>F<sub>8</sub> 75 sccm, SF<su... |
|||
| Line 36: | Line 36: | ||
<gallery caption="The results of the nano1. | <gallery caption="The results of the nano1.42 recipe" widths="250" heights="200" perrow="3"> | ||
image:WF_2E08a_23mar2011-030.jpg|The 30 nm trenches | image:WF_2E08a_23mar2011-030.jpg|The 30 nm trenches | ||
image:WF_2E08a_23mar2011-060.jpg|The 60 nm trenches | image:WF_2E08a_23mar2011-060.jpg|The 60 nm trenches | ||