Specific Process Knowledge/Lithography/Strip: Difference between revisions
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==Process power for plasma asher 4 & 5== | ==Process power for plasma asher 4 & 5== | ||
[[File:PA_power_v3.png| | [[File:PA_power_v3.png|400px|thumb|Ashing rate as function of microwave power.|right]] | ||
The ashing rate is related to the power used during processing. Higher power increases ashing rate. | The ashing rate is related to the power used during processing. Higher power increases ashing rate. | ||