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===Material for preparations ''(see also DTU Learn)''===
==Knowledge and Information about Thin Film Techniques==
'''Literature:'''
* [http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch5/pdf Sami Franssila "Introduction to Microfabrication" (2010), Chapter 5: Thin-Film Materials and Processes]


==Presentations from the lectures==
====Introduction to Thin Films====
 
<big>Slides from the 1<sup>st</sup> lecture</big>
*[https://labmanager.dtu.dk/function.php?module=MiscDocument&view=docs&page_id=387f  See LabManager (requires a login)]
<!--[[Media:1_DTU_Nanolab_Thin_Film_TPT_final_April_2023.pptx]]-->
 
<big>Slides from the 2<sup>nd</sup> lecture</big>
*[https://labmanager.dtu.dk/function.php?module=MiscDocument&view=docs&page_id=387f  See LabManager (requires a login)].
<!--[[Media:2_DTU_Nanolab_Thin_Film_TPT_final_May2023.pptx]]-->
 
==Literature==
 
Some literature about thin films can be found here (requires a login):
 
====Introduction to thin films====
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch5/pdf  S. Franssila, (2010), Introduction to Microfabrication, Chapter 5: Thin-Film Materials and Processes]
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch5/pdf  S. Franssila, (2010), Introduction to Microfabrication, Chapter 5: Thin-Film Materials and Processes]
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch7/pdf  S. Franssila, (2010), Introduction to Microfabrication, Chapter 7: Advanced Thin Films]
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch7/pdf  S. Franssila, (2010), Introduction to Microfabrication, Chapter 7: Advanced Thin Films]
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*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch13/pdf  S. Franssila, (2010), Introduction to Microfabrication, Chapter 13: Thermal Oxidation]
*[http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch13/pdf  S. Franssila, (2010), Introduction to Microfabrication, Chapter 13: Thermal Oxidation]


====Stress in thin films====
====Stress in Thin Films====
*[https://avs.scitation.org/doi/10.1116/1.5011790 Journal of Vacuum Science & Technology A 36, 020801 (2018) Review Article: Stress in thin films and coatings: Current status, challenges, and prospects]
*[https://avs.scitation.org/doi/10.1116/1.5011790 Journal of Vacuum Science & Technology A 36, 020801 (2018) Review Article: Stress in thin films and coatings: Current status, challenges, and prospects]
*[https://www.bruker.com/fileadmin/user_upload/8-PDF-Docs/SurfaceAnalysis/StylusProfilometry/ApplicationNotes/AN516-Thin_Film_Stress_Measurement_Using_Dektak_Stylus_P.pdf Dektak stress measurements]
*[https://www.bruker.com/fileadmin/user_upload/8-PDF-Docs/SurfaceAnalysis/StylusProfilometry/ApplicationNotes/AN516-Thin_Film_Stress_Measurement_Using_Dektak_Stylus_P.pdf Dektak stress measurements]
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Revision as of 15:15, 12 February 2025

The contents on this page, including all images and pictures, was created by DTU Nanolab staff unless otherwise stated.

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Thin Film Tool Package Training

DTU Nanolab offers a Tool Package Training for Thin Film Techniques (TPT Thin Film). You are required to pass this course, in order to get access to thin film equipment inside the DTU Nanolabs cleanroom facility. The course includes theory on thin film growth and deposition processes. The theory part consists of lecture videos followed by quizzes for each section. Once completed successfully, you can request hands-on training for the equipment inside the cleanroom via training@nanolab.dtu.dk.

The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course here.

Course Layout

  1. Online lecture videos (theory)
  2. Quizzes for each section
  3. Individual hands-on training (specific equipment)


Individual ands on training can be requested via training@nanolab.dtu.dk.

Learning objectives

  • Understand different film deposition methods
  • Learn different thin film formation mechanisms
  • be aware of relevant materials properties
  • compare and be able to understand appropriate thin film techniques
  • introduction to equipment at DTU Nanolab


Course Contents

  • Introduction to Thin Film Techniques
    • Thin Film Formation
    • Material Properties
    • Overview over Thin Film Techniques
  • Physical Vapour Deposition (PVD)
    • Introduction to PVD
    • Resistive thermal evaporation
    • E-beam Evaporation
    • Sputtering
  • Thermal Oxidation
  • Chemical Vapor Deposition (CVD)
  • Atomic Layer Deposition (ALD)


Qualifying Prerequisites

  • Cleanroom safety course at DTU Nanolab
  • Admission to the cleanroom must be obtained before the group training session


Course Responsible

  • Pernille Voss Larsen
  • Evgeniy Shkondin


If you have questions you can contact us via lithography@nanolab.dtu.dk.

Knowledge and Information about Thin Film Techniques

Introduction to Thin Films

Thermal oxidation

Stress in Thin Films



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