LabAdviser/Courses/TPT Thin Film: Difference between revisions

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Thin Film Tool Package Training

DTU Nanolab offers a Tool Package Training for Thin Film Techniques (TPT Thin Film). You are required to pass this course, in order to get access to thin film equipment inside the DTU Nanolabs cleanroom facility. The course includes theory on thin film growth and deposition processes. The theory part consists of lecture videos followed by quizzes for each section. Once completed successfully, you can request hands-on training for the equipment inside the cleanroom via training@nanolab.dtu.dk.

The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course here.

Course Layout

Online lecture videos (theory)
Quizzes for each section
Individual hands-on training (specific equipment)

Individual ands on training can be requested via training@nanolab.dtu.dk.

Learning objectives

Understand different film deposition methods
Learn different thin film formation mechanisms
be aware of relevant materials properties
compare and be able to understand appropriate thin film techniques
introduction to equipment at DTU Nanolab

Course Contents

Introduction to Thin Film Techniques
- Thin Film Formation
- Material Properties
- Overview over Thin Film Techniques
Physical Vapour Deposition (PVD)
- Introduction to PVD
- Resistive thermal evaporation
- E-beam Evaporation
- Sputtering
Thermal Oxidation
Chemical Vapor Deposition (CVD)
Atomic Layer Deposition (ALD)

Qualifying Prerequisites

Cleanroom safety course at DTU Nanolab
Admission to the cleanroom must be obtained before the group training session

Course Responsible

Pernille Voss Larsen
Evgeniy Shkondin

If you have questions you can contact us via lithography@nanolab.dtu.dk.

Material for preparations (see also DTU Learn)

Literature:

Sami Franssila "Introduction to Microfabrication" (2010), Chapter 5: Thin-Film Materials and Processes

Presentations from the lectures

Slides from the 1^st lecture

See LabManager (requires a login)

Slides from the 2^nd lecture

See LabManager (requires a login).

Literature

Some literature about thin films can be found here (requires a login):

Introduction to thin films

Thermal oxidation

S. Franssila, (2010), Introduction to Microfabrication, Chapter 13: Thermal Oxidation

@@ Line 52: / Line 52: @@
 <BR>
 If you have questions you can contact us via [mailto:thinfilm@nanolab.dtu.dk lithography@nanolab.dtu.dk].
 <br clear="all" />
 <BR>
+===Material for preparations ''(see also DTU Learn)''===
+'''Literature:'''
+* [http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch5/pdf Sami Franssila "Introduction to Microfabrication" (2010), Chapter 5: Thin-Film Materials and Processes]
-{|border="1" cellspacing="0" cellpadding="3" align="left" style="text-align:left;" style="width: 70%;"
-|-
-|-
-|-style="background:White; color:black; text-align:center"
-!colspan="2"|Thin film tool package training (TPT)
-|-
-|-
-!Schedule
-|
-===<b>Theoretical part</b>===
-<br>
-'''1<sup>st</sup> lecture (2 - 2½ hours):'''
-*Introduction to thin films
-**Thin film formation
-**Material properties
-**Overview of the techniques
-**LabAdviser
-*PVD (physical Vapour Deposition)
-**General notes on PVD
-**Resistive thermal evaporation
-**E-beam Evaporation
-**Sputtering
-<!--
-*Introduction to thin films
-*Before you start - Material properties to consider
-*Overview of thin film techniques at DTU Nanolab
-*Equipment overview in LabAdviser
-*Thin film techniques – 1<sup>st</sup> part:
-**Thermal oxidation
--->
-<i>
-The next lecture will be held on the 17th of April 2024 from 10-12 The lecture will be held in room 011 in building 451.
-Sign up for the next lecture here in DTU Learn: https://learn.inside.dtu.dk/d2l/le/discovery/view/course/56079.
-In DTU Learn, you first have to sign yourself up for the course and then enroll yourself in each of the two lectures under “Groups”.
-You can also send an email to thinfilm@nanolab.dtu.dk, if you want to attend the lecture.
-Please note that the Thin Film TPT course is mandatory for all new users that need to use thin film tools in the cleanroom, but it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.</i>
-<!--https://nanolab.doodle.com/poll/k4pdm2n4bpseww5e.
-If you cannot wait until September to join the lecture, then send an email to thinfilm@nanolab.dtu.dk.-->
-<!-- If you cannot wait until September to join the lecture, then send an email to thinfilm@nanolab.dtu.dk. There is a chance that we can arrange a lecture in August, if more people wants to attend this, or that we can make a video of the lecture.-->
-'''2<sup>nd</sup> lecture (3 - 3½ hours):'''
-*Thermal Oxidation
-*CVD (Chemical Vapour Deposition):
-**LPCVD (Low Pressure Chemical Vapour Deposition)
-**PECVD (Plasma Enhanced Chemical Vapour Deposition)
-*ALD (Atomic Layer Deposition)
-**Thermal ALD
-**Plasma Enhanced ALD
-*Comparison of thin film techniques
-<!--
-*Thin film techniques – 2<sup>nd</sup>  part:
-**PVD (physical vapour deposition)
-***E-beam evaporation
-***Thermal evaporation
-***Sputtering
-**CVD (chemical vapour depostion)
-***LPCVD (low pressure chemical vapour deposition)
-***PECVD (plasma enhanced chemical vapour deposition)
-**ALD (atomic layer deposition)
--->
-<i>The next lecture will be held on the 19th of April 2024 from 9-12. The lecture will be held in room 043 in building 345B.
-Sign up for the next lecture here in DTU Learn: https://learn.inside.dtu.dk/d2l/le/discovery/view/course/56079.
-In DTU Learn, you first have to sign yourself up for the course and then enroll yourself in each of the two lectures under “Groups”.
-You can also send an email to thinfilm@nanolab.dtu.dk, if you want to attend the lecture.
-Please note that the Thin Film TPT course is mandatory for all new users that need to use thin film tools in the cleanroom, but it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.
-<!-- Please note that it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk.</i>
-If you cannot wait until September to join the lecture, then send an email to thinfilm@nanolab.dtu.dk. There is a chance that we can arrange a lecture in August, if more people wants to attend this, or that we can make a video of the lecture.-->
-===<b>Practical part</b>===
-* None
-|-
-|-
-!Location
-|
-'''Theoretical part'''
-The locations for the lectures will be notified in the Doodles
-|-
-|-
-!Qualified prerequisites
-|
-None
-|-
-|-
-!Preparations
-|
-No preparation is required.
-However, a good overview of thin film processes can be found in [http://onlinelibrary.wiley.com/doi/10.1002/9781119990413.ch5/pdf Sami Franssila "Introduction to Microfabrication" (2010), Chapter 5: Thin-Film Materials and Processes] (requires login).
-Links to more literature about thin films can be found below.
-|-
-|-
-!Course responsible
-|
-The Thin Film group at DTU Nanolab (thinfilm@nanolab.dtu.dk)
-|-
-|-
-!Learning goals
-|
-*Be aware of relevant material properties for thin films made in the cleanroom
-*Understand different thin film techniques
-*Compare and be able to select appropriate thin film technique
-|-
-|}
-<br clear="all" />
 ==Presentations from the lectures==