LabAdviser/Courses/TPT Thin Film: Difference between revisions
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DTU Nanolab offers a Tool Package Training for Thin Film Techniques (TPT Thin Film). You are required to pass this course, in order to get access to thin film equipment inside the DTU Nanolabs cleanroom facility. The course includes theory on thin film growth and deposition processes. The theory part consists of lecture videos followed by quizzes for each section. Once completed successfully, you can request hands-on training for the equipment inside the cleanroom via training@nanolab.dtu.dk. | DTU Nanolab offers a Tool Package Training for Thin Film Techniques (TPT Thin Film). You are required to pass this course, in order to get access to thin film equipment inside the DTU Nanolabs cleanroom facility. The course includes theory on thin film growth and deposition processes. The theory part consists of lecture videos followed by quizzes for each section. Once completed successfully, you can request hands-on training for the equipment inside the cleanroom via training@nanolab.dtu.dk. | ||
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The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course here. | <BR> | ||
The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/thin-film-training here]. | |||
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'''Course Layout''' | '''Course Layout''' | ||
# Online lecture videos (theory) | # Online lecture videos (theory) | ||
# Quizzes for each section | # Quizzes for each section | ||
# Individual hands-on training (specific equipment) | # Individual hands-on training (specific equipment) | ||
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''Individual ands on training can be requested via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].'' | ''Individual ands on training can be requested via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].'' | ||
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'''Learning objectives''' | '''Learning objectives''' | ||
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* Understand different film deposition methods | * Understand different film deposition methods | ||
* Learn different thin film formation mechanisms | * Learn different thin film formation mechanisms | ||
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* compare and be able to understand appropriate thin film techniques | * compare and be able to understand appropriate thin film techniques | ||
* introduction to equipment at DTU Nanolab | * introduction to equipment at DTU Nanolab | ||
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Course Contents | '''Course Contents''' | ||
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* Introduction to Thin Film Techniques | * Introduction to Thin Film Techniques | ||
** Thin Film Formation | ** ''Thin Film Formation'' | ||
** Material Properties | ** ''Material Properties'' | ||
** Overview over Thin Film Techniques | ** ''Overview over Thin Film Techniques'' | ||
* Physical Vapour Deposition (PVD) | * Physical Vapour Deposition (PVD) | ||
** ''Introduction to PVD'' | ** ''Introduction to PVD'' | ||
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* Chemical Vapor Deposition (CVD) | * Chemical Vapor Deposition (CVD) | ||
* Atomic Layer Deposition (ALD) | * Atomic Layer Deposition (ALD) | ||
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Qualifying Prerequisites | '''Qualifying Prerequisites''' | ||
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Cleanroom safety course at DTU Nanolab | * Cleanroom safety course at DTU Nanolab | ||
Admission to the cleanroom must be obtained before the group training session | * Admission to the cleanroom must be obtained before the group training session | ||
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Course Responsible | '''Course Responsible''' | ||
* Pernille Voss Larsen | * Pernille Voss Larsen | ||
* Evgeniy Shkondin | * Evgeniy Shkondin | ||
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If you have questions you can contact us via [mailto:thinfilm@nanolab.dtu.dk lithography@nanolab.dtu.dk]. | |||
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