LabAdviser/Courses/TPT Thin Film: Difference between revisions
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The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course here. | The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course here. | ||
'''Course | '''Course Layout''' | ||
# Online lecture videos (theory) | |||
# Quizzes for each section | |||
# Individual hands-on training (specific equipment) | |||
''Individual ands on training can be requested via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].'' | |||
'''Learning objectives''' | |||
''Learn about the fundamentals of lithography processing in a cleanroom.'' | |||
* Understand different film deposition methods | |||
* Learn different thin film formation mechanisms | |||
* be aware of relevant materials properties | |||
* compare and be able to understand appropriate thin film techniques | |||
* introduction to equipment at DTU Nanolab | |||
Course Contents | |||
* Introduction to Thin Film Techniques | * Introduction to Thin Film Techniques | ||
** Thin Film Formation | ** Thin Film Formation | ||
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* Chemical Vapor Deposition (CVD) | * Chemical Vapor Deposition (CVD) | ||
* Atomic Layer Deposition (ALD) | * Atomic Layer Deposition (ALD) | ||
Qualifying Prerequisites | |||
** | |||
Cleanroom safety course at DTU Nanolab | |||
Admission to the cleanroom must be obtained before the group training session | |||
Course Responsible | |||
* Pernille Voss Larsen | |||
* Evgeniy Shkondin | |||
If you have questions you can contact us via lithography@nanolab.dtu.dk. | |||
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