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The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course here.
The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course here.


'''Course Description'''
'''Course Layout'''
# Online lecture videos (theory)
# Quizzes for each section
# Individual hands-on training (specific equipment)


''Individual ands on training can be requested via [mailto:training@nanolab.dtu.dk training@nanolab.dtu.dk].''
'''Learning objectives''' 
''Learn about the fundamentals of lithography processing in a cleanroom.''
* Understand different film deposition methods
* Learn different thin film formation mechanisms
* be aware of relevant materials properties
* compare and be able to understand appropriate thin film techniques
* introduction to equipment at DTU Nanolab
Course Contents
* Introduction to Thin Film Techniques  
* Introduction to Thin Film Techniques  
** Thin Film Formation
** Thin Film Formation
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* Chemical Vapor Deposition (CVD)
* Chemical Vapor Deposition (CVD)
* Atomic Layer Deposition (ALD)
* Atomic Layer Deposition (ALD)
*
 
* '''Learning objectives'''  ''Learn about the fundamentals of lithography processing in a cleanroom:''
Qualifying Prerequisites
** Understand different film deposition methods
 
** Learn different thin film formation mechanisms
Cleanroom safety course at DTU Nanolab
** be aware of relevant materials properties
Admission to the cleanroom must be obtained before the group training session
** compare and be able to understand appropriate thin film techniques
 
** introduction to equipment at DTU Nanolab
Course Responsible
* Pernille Voss Larsen
* Evgeniy Shkondin
 
If you have questions you can contact us via lithography@nanolab.dtu.dk.
 
 
 
 
 


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