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'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Courses/TPT_Thin_Film click here]'''  
''The contents on this page, including all images and pictures, was created by DTU Nanolab staff unless otherwise stated.''


''This page is written by DTU Nanolab internal''
'''Feedback to this page''': '''[mailto:labadviser@nanolab.dtu.dk?Subject=Feed%20back%20from%20page%20http://labadviser.nanolab.dtu.dk/index.php/LabAdviser/Courses/TPT_Thin_Film click here]'''


==Thin Film TPT ==
== Thin Film Tool Package Training ==


DTU Nanolab offers a Tool Package Training (TPT) course in thin film growth and deposition techniques.  
DTU Nanolab offers a Tool Package Training for Thin Film Techniques (TPT Thin Film). You are required to pass this course, in order to get access to thin film equipment inside the DTU Nanolabs cleanroom facility. The course includes theory on thin film growth and deposition processes. The theory part consists of lecture videos followed by quizzes for each section. Once completed successfully, you can request hands-on training for the equipment inside the cleanroom via training@nanolab.dtu.dk.  


Users that have to use any thin film growth and/or deposition tools in the cleanroom will have to sign up for the lectures, before they apply for a training (i.e. it is possible to get a training and then attend the lectures afterwards).
The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course here.
 
'''Course Description'''
 
* Introduction to Thin Film Techniques
** Thin Film Formation
** Material Properties
** Overview over Thin Film Techniques
* Physical Vapour Deposition (PVD)
** ''Introduction to PVD''
** ''Resistive thermal evaporation''
** ''E-beam Evaporation''
** ''Sputtering''
* Thermal Oxidation
* Chemical Vapor Deposition (CVD)
* Atomic Layer Deposition (ALD)
*
* '''Learning objectives'''  ''Learn about the fundamentals of lithography processing in a cleanroom:''
** Understand different film deposition methods
** Learn different thin film formation mechanisms
** be aware of relevant materials properties
** compare and be able to understand appropriate thin film techniques
** introduction to equipment at DTU Nanolab


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