LabAdviser/Courses/TPT Thin Film

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Thin Film Tool Package Training

DTU Nanolab offers a Tool Package Training for Thin Film Techniques (TPT Thin Film). You are required to pass this course, in order to get access to thin film equipment inside the DTU Nanolabs cleanroom facility. The course includes theory on thin film growth and deposition processes. The theory part consists of lecture videos followed by quizzes for each section. Once completed successfully, you can request hands-on training for the equipment inside the cleanroom via training@nanolab.dtu.dk.

The course is available via DTU Learn. You sign up for the course by enrolling yourself in the course here.

Course Description

• Introduction to Thin Film Techniques
  • Thin Film Formation
  • Material Properties
  • Overview over Thin Film Techniques
• Physical Vapour Deposition (PVD)
  • Introduction to PVD
  • Resistive thermal evaporation
  • E-beam Evaporation
  • Sputtering
• Thermal Oxidation
• Chemical Vapor Deposition (CVD)
• Atomic Layer Deposition (ALD)
• Learning objectives Learn about the fundamentals of lithography processing in a cleanroom:
  • Understand different film deposition methods
  • Learn different thin film formation mechanisms
  • be aware of relevant materials properties
  • compare and be able to understand appropriate thin film techniques
  • introduction to equipment at DTU Nanolab

Thin film tool package training (TPT)
Schedule	Theoretical part 1st lecture (2 - 2½ hours): Introduction to thin films Thin film formation Material properties Overview of the techniques LabAdviser PVD (physical Vapour Deposition) General notes on PVD Resistive thermal evaporation E-beam Evaporation Sputtering The next lecture will be held on the 17th of April 2024 from 10-12 The lecture will be held in room 011 in building 451. Sign up for the next lecture here in DTU Learn: https://learn.inside.dtu.dk/d2l/le/discovery/view/course/56079. In DTU Learn, you first have to sign yourself up for the course and then enroll yourself in each of the two lectures under “Groups”. You can also send an email to thinfilm@nanolab.dtu.dk, if you want to attend the lecture. Please note that the Thin Film TPT course is mandatory for all new users that need to use thin film tools in the cleanroom, but it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk. 2nd lecture (3 - 3½ hours): Thermal Oxidation CVD (Chemical Vapour Deposition): LPCVD (Low Pressure Chemical Vapour Deposition) PECVD (Plasma Enhanced Chemical Vapour Deposition) ALD (Atomic Layer Deposition) Thermal ALD Plasma Enhanced ALD Comparison of thin film techniques The next lecture will be held on the 19th of April 2024 from 9-12. The lecture will be held in room 043 in building 345B. Sign up for the next lecture here in DTU Learn: https://learn.inside.dtu.dk/d2l/le/discovery/view/course/56079. In DTU Learn, you first have to sign yourself up for the course and then enroll yourself in each of the two lectures under “Groups”. You can also send an email to thinfilm@nanolab.dtu.dk, if you want to attend the lecture. Please note that the Thin Film TPT course is mandatory for all new users that need to use thin film tools in the cleanroom, but it is possible to apply for a training before you attend the lecture, if you send an email to training@nanolab.dtu.dk. Practical part None
Location	Theoretical part The locations for the lectures will be notified in the Doodles
Qualified prerequisites	None
Preparations	No preparation is required. However, a good overview of thin film processes can be found in Sami Franssila "Introduction to Microfabrication" (2010), Chapter 5: Thin-Film Materials and Processes (requires login). Links to more literature about thin films can be found below.
Course responsible	The Thin Film group at DTU Nanolab (thinfilm@nanolab.dtu.dk)
Learning goals	Be aware of relevant material properties for thin films made in the cleanroom Understand different thin film techniques Compare and be able to select appropriate thin film technique

Presentations from the lectures

Slides from the 1^st lecture

• See LabManager (requires a login)

Slides from the 2^nd lecture

• See LabManager (requires a login).

Literature

Some literature about thin films can be found here (requires a login):

Introduction to thin films

• S. Franssila, (2010), Introduction to Microfabrication, Chapter 5: Thin-Film Materials and Processes
• S. Franssila, (2010), Introduction to Microfabrication, Chapter 7: Advanced Thin Films
• D. M. Mattox,(2015) Handbook of Physical Vapor Deposition (PVD) Processing (Second Edition), Chapter 10: Atomistic Film Growth and Some Growth-Related Film Properties
• K. Oura et al., (2003), Surface Science, Chapter 14: Growth of Thin Films

Thermal oxidation

• S. Franssila, (2010), Introduction to Microfabrication, Chapter 13: Thermal Oxidation

Stress in thin films

• Journal of Vacuum Science & Technology A 36, 020801 (2018) Review Article: Stress in thin films and coatings: Current status, challenges, and prospects
• Dektak stress measurements