LabAdviser/Courses/TPT Dry Etch: Difference between revisions
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'''Learning objectives''' | '''Learning objectives''' | ||
Learn about the fundamentals of plasma dry etch processing in a cleanroom: | ''Learn about the fundamentals of plasma dry etch processing in a cleanroom:'' | ||
* Generation and Characteristics of the Etch Plasma | * Generation and Characteristics of the Etch Plasma | ||
* Introduction to dry etch process | * Introduction to dry etch process | ||