LabAdviser/Courses: Difference between revisions
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|Theoretical and practical safety training. All new cleanroom users must obtain DTU Nanolab’s introduction course certificate before access to the cleanroom is granted. Find more information and sign up [https://www.nanolab.dtu.dk/access/cleanroom-access/introduction-course here]. | |Theoretical and practical safety training. All new cleanroom users must obtain DTU Nanolab’s introduction course certificate before access to the cleanroom is granted. Find more information and sign up [https://www.nanolab.dtu.dk/access/cleanroom-access/introduction-course here]. | ||
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!Safety Introduction Course for "Other Facilities" | !Safety Introduction Course for "Other Facilities" | ||
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|DTU Nanolab offers a range of open access laboratories dedicated to both fabrication and characterization purposes. These facilities are situated in buildings 307, 346, and 347. Find more information and sign up [https://www.nanolab.dtu.dk/access/other-facilities here]. | |DTU Nanolab offers a range of open access laboratories dedicated to both fabrication and characterization purposes. These facilities are situated in buildings 307, 346, and 347. Find more information and sign up [https://www.nanolab.dtu.dk/access/other-facilities here]. | ||
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!Lithography TPT | !Lithography TPT | ||
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|This online course presents the theory on lithographic processes and equipment, as well as training in equipment operation in the cleanroom. The course is a prerequisite for hands-on training on all lithography equipment. Find more information on the [https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Lithography#Lithography_Tool_Package_Training Lithography TPT] and sign up [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/lithography-tool-training here]. | |This online course presents the theory on lithographic processes and equipment, as well as training in equipment operation in the cleanroom. The course is a prerequisite for hands-on training on all lithography equipment. Find more information on the [https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Lithography#Lithography_Tool_Package_Training Lithography TPT] and sign up [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/lithography-tool-training here]. | ||
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!SEM TPT | !SEM TPT | ||
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|This online course presents the theory about scanning electron microscopy, as well as training in equipment operation. It is also irregularly held as in-person lecture at DTU Nanolab. The course is a prerequisite for hands-on training on any of the SEMs in building 314 and 346 at DTU Nanolab and for the SEM in building 375 at DTU Offshore. Find more information on the [https://labadviser.nanolab.dtu.dk/index.php?title=LabAdviser/Courses/TPT_SEM SEM TPT] and sign up [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/scanning-electron-microscopy-sem here]. | |This online course presents the theory about scanning electron microscopy, as well as training in equipment operation. It is also irregularly held as in-person lecture at DTU Nanolab. The course is a prerequisite for hands-on training on any of the SEMs in building 314 and 346 at DTU Nanolab and for the SEM in building 375 at DTU Offshore. Find more information on the [https://labadviser.nanolab.dtu.dk/index.php?title=LabAdviser/Courses/TPT_SEM SEM TPT] and sign up [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/scanning-electron-microscopy-sem here]. | ||
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!Dry Etch TPT | !Dry Etch TPT | ||
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|This online course presents the theory on dry etching and equipment, as well as training in equipment operation. The course is a prerequisite for hands-on training on any of the dry etching equipment in the cleanroom. Find more information on the [https://labadviser.nanolab.dtu.dk/index.php?title=LabAdviser/Courses/TPT_Dry_Etch Dry Etch TPT] and sign up [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/dry-etch-tool-training here] | |This online course presents the theory on dry etching and equipment, as well as training in equipment operation. The course is a prerequisite for hands-on training on any of the dry etching equipment in the cleanroom. Find more information on the [https://labadviser.nanolab.dtu.dk/index.php?title=LabAdviser/Courses/TPT_Dry_Etch Dry Etch TPT] and sign up [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/dry-etch-tool-training here] | ||
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!Thin Film TPT | !Thin Film TPT | ||
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|This online course introduces the theory for thin film growth and deposition techniques available at DTU Nanolab. The course is a prerequisite for hands-on training on most of the thin film equipment in the cleanroom. Find more information on the [https://labadviser.nanolab.dtu.dk/index.php?title=LabAdviser/Courses/TPT_Thin_Film Thin Film TPT] and sign up [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/thin-film-training here]. | |This online course introduces the theory for thin film growth and deposition techniques available at DTU Nanolab. The course is a prerequisite for hands-on training on most of the thin film equipment in the cleanroom. Find more information on the [https://labadviser.nanolab.dtu.dk/index.php?title=LabAdviser/Courses/TPT_Thin_Film Thin Film TPT] and sign up [https://www.nanolab.dtu.dk/access/cleanroom-access/equipment-training/thin-film-training here]. | ||
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!M.Sc. course: 10851 - Introduction to Cleanroom-based Microfabrication | !M.Sc. course: 10851 - Introduction to Cleanroom-based Microfabrication | ||
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|The overall aim of the course is to provide you with theoretical background and hands-on experience in the most common experimental techniques used for Silicon microfabrication. You will be introduced to microfabrication methods such as photolithography, etching, thin film deposition and characterization techniques such as scanning electron microscopy (SEM) and profilometry. During the course students will fabricate a working pressure sensor and characterize it in the DTU Nanolab cleanroom. This will enable you to design a fabrication process, draw a lithographic mask and work safely in the DTU Nanolab cleanroom. The TPT courses are a main part of the course. The course gives you 5 ECTS points. Find more information and sign up [https://kurser.dtu.dk/course/10851 here] | |The overall aim of the course is to provide you with theoretical background and hands-on experience in the most common experimental techniques used for Silicon microfabrication. You will be introduced to microfabrication methods such as photolithography, etching, thin film deposition and characterization techniques such as scanning electron microscopy (SEM) and profilometry. During the course students will fabricate a working pressure sensor and characterize it in the DTU Nanolab cleanroom. This will enable you to design a fabrication process, draw a lithographic mask and work safely in the DTU Nanolab cleanroom. The TPT courses are a main part of the course. The course gives you 5 ECTS points. Find more information and sign up [https://kurser.dtu.dk/course/10851 here] | ||
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!M.Sc. course: 10862 - Polymer micro fabrication | !M.Sc. course: 10862 - Polymer micro fabrication | ||