LabAdviser/Courses

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Courses

We have made a number of courses to prepare our users for their work in our cleanroom facility and available equipment, as well as training for our other facilities. Below you find a list of available courses. The Safety Introduction Course is mandatory for all users that need to use our cleanroom facilities on their own. Then there is a number of TPT's (Tool Package Training Courses) that you need to attend depending on which kind of tool you want to use.

Course	Mandatory...	Short Course Decription
Safety Introduction Course	for working inside the cleanroom	Theoretical and practical safety training. All new cleanroom users must obtain DTU Nanolab’s introduction course certificate before access to the cleanroom is granted. Find more information and sign up here.
Safety Introduction Course for "Other Facilities"	for working in other Nanolab facilities	DTU Nanolab offers a range of open access laboratories dedicated to both fabrication and characterization purposes. These facilities are situated in buildings 307, 346, and 347. Find more information and sign up here.
Lithography TPT	for working with Lithography Equipment	This online course presents the theory on lithographic processes and equipment, as well as training in equipment operation in the cleanroom. The course is a prerequisite for hands-on training on all lithography equipment. Find more information on the Lithography TPT and sign up here.
SEM TPT	for getting access to SEMs at DTU Nanolab	This online course presents the theory about scanning electron microscopy, as well as training in equipment operation. It is also irregularly held as in-person lecture at DTU Nanolab. The course is a prerequisite for hands-on training on any of the SEMs in building 314 and 346 at DTU Nanolab and for the SEM in building 375 at DTU Offshore. Find more information on the SEM TPT and sign up here.
Dry Etch TPT	for getting access to Dry Etch Equipment	This online course presents the theory on dry etching and equipment, as well as training in equipment operation. The course is a prerequisite for hands-on training on any of the dry etching equipment in the cleanroom. Find more information on the Dry Etch TPT and sign up here
Thin Film TPT	for getting access to Thin Film Deposition & Thermal Growth Equipment	This online course introduces the theory for thin film growth and deposition techniques available at DTU Nanolab. The course is a prerequisite for hands-on training on most of the thin film equipment in the cleanroom. Find more information on the Thin Film TPT and sign up here.
Ph.d. course: 10868 - Methods in Micro and Nanofabrication	for ph.d. students at Nanolab	This is a course aimed at PhD students new to work in the DTU Nanolab cleanroom. The objective is to accelerate research projects by providing a fast track learning towards hands-on cleanroom fabrication. To attend the course you MUST have a PhD project (or similar) that require you to work in the DTU Nanolab cleanroom. The course gives you a chance to present and discuss your project with some of your fellow PhD students and experienced process specialists from DTU Nanolab. The TPT courses are a main part of the course. The course gives you 5 ECTS points. Find more information and sign up here
M.Sc. course: 10851 - Introduction to Cleanroom-based Microfabrication	for master students	The overall aim of the course is to provide you with theoretical background and hands-on experience in the most common experimental techniques used for Silicon microfabrication. You will be introduced to microfabrication methods such as photolithography, etching, thin film deposition and characterization techniques such as scanning electron microscopy (SEM) and profilometry. During the course students will fabricate a working pressure sensor and characterize it in the DTU Nanolab cleanroom. This will enable you to design a fabrication process, draw a lithographic mask and work safely in the DTU Nanolab cleanroom. The TPT courses are a main part of the course. The course gives you 5 ECTS points. Find more information and sign up here

Links to training videos

DTU Nanolab has a YouTube channel where we have gathered all our training videos: [1]

We have a number of playlists and some single videos for equipment. You can get an overview here with links to the playlists/videos on You Tube

Safety and behavior

• Nanolab introduction course: Safety in the Cleanroom [2]
• Safety at DTU Nanolab [3]
• Behaviour in the cleanroom at DTU Nanolab [4]
• Playlist: Craftsmen in the cleanroom/håndværkere i renrummet. [5]

Labmanager and Labadviser

• Playlist: DTU Nanolab systems (Labmanager and Labadviser)[6]

Wet chemistry

• Training in fume hoods part 1 - Intro and Getting Started [7]
• Training in fume hoods part 2 - Working With Acids, Bases and Solvents [8]
• Training in fume hoods part 3 – Wet benches and errors [9]
• Using Quick Dump Rinse Baths [10]
• Native Silicon Dioxide Removal [11]

Lithography

• Playlist: Lithography TPT lecture videos [12]
• Playlist: Lithography TPT tool training videos (equipment) [13] (spin coater, mask aligner, developer)
• E-beam lithography at DTU Nanolab [14]
• JEOL 9500 EBL Training [15]
• Playlist: MLA [16]
• Manual spin coater Labspin Training [17]
• Developer: TMAH Manual [18]

Thin Film deposition and oxidation

• Playlist: E-beam evaporator (Temescal) [19]
• Lesker dual chamber sputter system at DTU Nanolab [20]
• Antistiction treatment [21]
• Furnace training: Oxidation furnace [22]

Dry Etch

• Playlist: Dry Etch TPT - hands-on videos [23]
• Playlist: Dry Etch TPT - Lecture videos [24]

Characterization

• Playlist: SEM Training videos for Zeiss Supra SEMs in building 346 [25]
• Playlist: AFM Icon Nanoscope software training part I/II/III [26]
• Ellipsometer training [27]
• Playlist: XPS [28]

Backend tools

• Disco Dicing saw - blade exchange [29]