Specific Process Knowledge/Lithography/Strip: Difference between revisions
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<b>Test parameters:</b><br> | <b>Test parameters:</b><br> | ||
Total gas flow rate: | Total gas flow rate: tested parameter<br> | ||
Gas mix ratio: | Gas mix ratio: 30% nitrogen<br> | ||
DSC: 1.3 mbar<br> | DSC: 1.3 mbar<br> | ||
Chamber pressure: 1.3 mbar<br> | Chamber pressure: 1.3 mbar<br> | ||