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Specific Process Knowledge/Thin film deposition/Deposition of Platinum/Deposition of Pt in Sputter System (Lesker): Difference between revisions

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=Pt Sputtering=
=Pt Sputtering=


This page presents the results of Pt deposition using <b>DC sputtering</b> in Sputter-System Lesker, now commonly known as "Old Lesker". The deposition target is <b>Pt</b>. Source #2 (DC) was used.
This page presents the results of Pt deposition using <b>DC sputtering</b> in Sputter-System (Lesker), now commonly known as "Old Lesker". The deposition target is <b>Pt</b>. Source #2 (DC) was used.


The fabrication and characterization described below were conducted in <b>2021 by Evgeniy Shkondin, DTU Nanolab</b>. The focus of the study was the deposition conditions.  
The fabrication and characterization described below were conducted in <b>2021 by Evgeniy Shkondin, DTU Nanolab</b>. The focus of the study was the deposition conditions.  
Retrieved from "https://labadviser.nanolab.dtu.dk//index.php?title=Specific_Process_Knowledge/Thin_film_deposition/Deposition_of_Platinum/Deposition_of_Pt_in_Sputter_System_(Lesker)"