Specific Process Knowledge/Lithography/EBeamLithography/FilePreparation: Difference between revisions

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-note 2: Always add 10% to the current in this command to make sure you work well below 100 MHz and thus will not be affected if the current fluctuates above the base current.
+note 2: Always add 5% to the current in this command to make sure you work well below 200 MHz and thus will not be affected if the current fluctuates above the base current.
 == Dose variation ==