Specific Process Knowledge/Thin film deposition/Deposition of Alumina: Difference between revisions
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*1-5 100 mm wafers | *1-5 100 mm wafers | ||
*1-5 150 mm wafers | *1-5 150 mm wafers | ||
*1-3 200 mm wafers | |||
*Several smaller samples | *Several smaller samples | ||
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