Specific Process Knowledge/Etch/DRIE-Pegasus/DREM: Difference between revisions
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|PressureDepDelay= |PressureDepBoost= |PressureDepMain=100% | |PressureDepDelay= |PressureDepBoost= |PressureDepMain=100% | ||
|PressureEtchDelay= |PressureEtchBoost= |PressureEtchMain=100% | |PressureEtchDelay= |PressureEtchBoost= |PressureEtchMain=100% | ||
|C4F8DepDelay=0.3@5 |C4F8DepBoost= 0.5@50 |C4F8DepMain=200 | |C4F8DepDelay=0.3@5 |C4F8DepBoost= 0.5@ 50 |C4F8DepMain=200 | ||
|C4F8EtchDelay=0.5@ 100 |C4F8EtchBoost= |C4F8EtchMain=5 | |C4F8EtchDelay=0.5@ 100 |C4F8EtchBoost= |C4F8EtchMain=5 | ||
|SF6DepDelay=0.3@ 200 |SF6DepBoost=0.5@ 200 |SF6DepMain=15 | |SF6DepDelay=0.3@ 200 |SF6DepBoost=0.5@ 200 |SF6DepMain=15 | ||