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Specific Process Knowledge/Lithography/Resist/UVresist: Difference between revisions

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===KS Aligner===
===Aligner: MA6 - 1===
The KS Aligner has an i-line notch filter installed. This results in an exposure light peak around 365 nm with a FWHM of 7 nm.
The Aligner: MA6 - 1 has an i-line notch filter installed. This results in an exposure light peak around 365 nm with a FWHM of 7 nm.


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For smaller angle (~5°), develop 30 seconds instead
For smaller angle (~5°), develop 30 seconds instead
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===Aligner: MA6 - 2===
===Aligner: MA6 - 2===
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