Specific Process Knowledge/Etch/DRIE-Pegasus/DREM: Difference between revisions
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{{Template:Peg1Table9Head | {{Template:Peg1Table9Head | ||
|TableHeader=DREM 2kW micro | |TableHeader=DREM 2kW micro | ||
|TableStyle = class="wikitable" | |||
|PaddingStyle=padding:0px; | |||
|ActualPressure= | |||
}} | }} | ||
{{Template:Peg1Table9Row | {{Template:Peg1Table9Row | ||
|RecipeName=DREM 2kW micro | |RecipeName=DREM 2kW micro | ||
|PriorProcessSteps= Pump to base, Clamp Substrate, home platen matching unit, stabilisation | |PriorProcessSteps= Pump to base, Clamp Substrate, home platen matching unit, stabilisation | ||
|PaddingStyle=padding:0px; | |||
|ActualPressure= | |||
|Keywords= | |Keywords= | ||
|PlatenPosition=U |PlatenFrequency=HF |StabilisationTime= |StartCycleEndCycle=D/E | |PlatenPosition=U |PlatenFrequency=HF |StabilisationTime= |StartCycleEndCycle=D/E | ||
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|RecipeName=DREM 2kW micro | |RecipeName=DREM 2kW micro | ||
|PriorProcessSteps= Pump to base, Clamp Substrate, home platen matching unit, stabilisation | |PriorProcessSteps= Pump to base, Clamp Substrate, home platen matching unit, stabilisation | ||
|PaddingStyle=padding:0px; | |||
|ActualPressure= | |||
|Keywords= | |Keywords= | ||
|PlatenPosition=U |PlatenFrequency=HF |StabilisationTime= |StartCycleEndCycle=D/E | |PlatenPosition=U |PlatenFrequency=HF |StabilisationTime= |StartCycleEndCycle=D/E | ||