Revision as of 09:14, 11 November 2024

The DREM processes

**DREM 2kW micro**
Recipe	General			Pressure			Gases						Generators				Matching				Results
	General			Pressure			C₄F₈			SF₆			Coil	Platen			Coil		Platen		Results
	T	S/E	Dp	D	B	M	D	B	M	D	B	M	Dp	Dep			L	T	L	T	Pressure	Runs
	H/L	Cyc	Et	D	B	M	D	B	M	D	B	M	Et	D	B	M	L	T	L	T	Keywords
DREM 2kW micro	Pump to base, Clamp Substrate, home platen matching unit, stabilisation																				{{{ActualPressure}}}	8
	0	D/E	1.2			100%	0.3@5	0.5@50	200	0.3@200	0.5@200	15	2	1			40	50	32.5	51.9
	HF		3			100%	0.5@100		5	2@15	0.3@100	200	2	1@1	1@100	1	40	50	32.5	51.9
DREM 2kW micro	Pump to base, Clamp Substrate, home platen matching unit, stabilisation																				{{{ActualPressure}}}	1
	-19	D/E	1.2			100%	0.3@5	0.5@50	200	0.3@200	0.5@200	15	2	1			40	50	32.5	51.9
	HF		3			100%	0.5@100		5	2@15	0.3@100	200	2	1@1	1@100	1	40	50	32.5	51.9

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