Specific Process Knowledge/Wafer and sample drying: Difference between revisions
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== Spin dryer 4 == | == Spin dryer 4 == | ||
[[File: | [[File:spinDryer_4.jpg|640px|thumb|right]] | ||
Spin dryer 4 is located in D-3 between the HF vapor phase etcher and wet bench 07. | Spin dryer 4 is located in D-3 between the HF vapor phase etcher and wet bench 07. | ||