Specific Process Knowledge/Lithography: Difference between revisions
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'''<big>Lithography TPT lecture slides</big>'''<br> | '''<big>Lithography TPT lecture slides</big>'''<br> | ||
''' NB: Access to slides require login''' | ''' NB: Access to slides require login''' | ||
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*[https://labmanager.dtu.dk/view_binary.php?class=MiscDocument&id=4&name=Litho_Tool_Package_-_Post_processing.pdf TPT slides: Post-processing] | *[https://labmanager.dtu.dk/view_binary.php?class=MiscDocument&id=4&name=Litho_Tool_Package_-_Post_processing.pdf TPT slides: Post-processing] | ||
*[https://labmanager.dtu.dk/view_binary.php?class=MiscDocument&id=4&name=Litho_Tool_Package_-_Process_effects_and_examples.pdf TPT slides: Process Effects and Examples] | *[https://labmanager.dtu.dk/view_binary.php?class=MiscDocument&id=4&name=Litho_Tool_Package_-_Process_effects_and_examples.pdf TPT slides: Process Effects and Examples] | ||
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'''<big>Training videos</big>''' | '''<big>Training videos</big>''' | ||
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*[https://www.youtube.com/watch?v=btinNzYnLnY Training Video: Manual Puddle Developer] | *[https://www.youtube.com/watch?v=btinNzYnLnY Training Video: Manual Puddle Developer] | ||
'''Playlists on YouTube:''' | '''Playlists on YouTube:''' | ||
*[https://www.youtube.com/watch?v=3JhM3rmLVpA&list=PLjWVU97LayHAiCabstMfAUeeWyQoQI_cV Maskless aligner training videos] | *[https://www.youtube.com/watch?v=3JhM3rmLVpA&list=PLjWVU97LayHAiCabstMfAUeeWyQoQI_cV Maskless aligner training videos] | ||
*[https://www.youtube.com/watch?v=3JhM3rmLVpA&list=PLjWVU97LayHCX4sz2AH_YiPbNRmkrBYe5 Old Lithography TPT training videos] | |||
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'''<big>Process Flows</big>''' | '''<big>Process Flows</big>''' | ||
*[[Specific_Process_Knowledge/Lithography/Resist#UV_resist_comparison_table|UV resist process flows]] | *[[Specific_Process_Knowledge/Lithography/Resist#UV_resist_comparison_table|UV resist process flows]] | ||
*[[Specific_Process_Knowledge/Lithography/EBeamLithography#E-beam_resists_and_Process_flow|E-beam resist process flows]] | *[[Specific_Process_Knowledge/Lithography/EBeamLithography#E-beam_resists_and_Process_flow|E-beam resist process flows]] | ||
*[[:Media:Process_Flow_TPT first print.pdf|Old TPT process flow (first print)]] | |||
*[[:Media:Process_Flow_TPT alignment.pdf|Old TPT process flow (alignment)]] | |||
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