Specific Process Knowledge/Characterization/XRD: Difference between revisions
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and thin film thickness measurement | and thin film thickness measurement | ||
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*Phase ID | |||
*Crystal Size | |||
*Crystallinity | |||
*Quality and degree of orientation | |||
*3D orientation | |||
*Latice strain | |||
*Composition | |||
*Twist | |||
*3D lattice constant | |||
*Thickness | |||
*Roughness | |||
*Density | |||
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*Phase ID | *Phase ID | ||