Specific Process Knowledge/Lithography/EBeamLithography/Cassettes: Difference between revisions
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== Cassette overview == | == Cassette overview == | ||
The table below provides details on all available cassettes. | |||
Users of the chip cassettes should notice that there is a significant y-axis offset between the slot center positions and the actual stage position. The measured offsets are indicated in the table. As seen, they are all negative and hence users should apply a positive y-axis offset in order to get the pattern exposed correctly in the center of the slot/substrate. | |||
There is also a minor shift between the pre-aligner coordinates and the actual stage coordinates. These are indicated in the last column. In order to hit the alignment mark on the first scan users should add this offset to the P-mark offset found on the pre-aligner. | |||
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|+ Cassette overview | |+ Cassette overview | ||
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| Chips || BM4P-509 || 3A, 3B, 3C, 3D || Ti || [[image:BM4P-509_cas.png|800px]] || [[image:BM4P-509 small.png|300px]] | | Chips || BM4P-509 || 3A, 3B, 3C, 3D || Ti || [[image:BM4P-509_cas.png|800px]] || [[image:BM4P-509 small.png|300px]] | ||
|| | || 3A: -810 µm | ||
3A: -810 µm | |||
3B: -780 µm | 3B: -780 µm | ||