Specific Process Knowledge/Lithography/EBeamLithography/Cassettes: Difference between revisions
Appearance
| Line 102: | Line 102: | ||
|- | |- | ||
| 4" || BM2P-011 || 4D, 4E || Al || [[image:BM2P-011_cas.png|800px]] || [[image:BM2P-011 small.png|300px]] || 4D: (330,150) | | 4" || BM2P-011 || 4D, 4E || Al || [[image:BM2P-011_cas.png|800px]] || [[image:BM2P-011 small.png|300px]] || || 4D: (330,150) | ||
|- | |- | ||