Specific Process Knowledge/Lithography/EBeamLithography/Cassettes: Difference between revisions
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| 6" || BW6-009 || 6A || Al || [[image:BW6-009.png|800px]] || [[image:BW6-009 small.png|300px]] | | 6" || BW6-009 || 6A || Al || [[image:BW6-009.png|800px]] || [[image:BW6-009 small.png|300px]] || | ||
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| 6" || BW6-042 || 6A || Al || [[image:BW6-042_cas.png|800px]] || [[image:BW6-009 small.png|300px]] | | 6" || BW6-042 || 6A || Al || [[image:BW6-042_cas.png|800px]] || [[image:BW6-009 small.png|300px]] || | ||
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| 8" || BSPCL-514 || 8A || Ti || [[image:BPSPCL-514_cas.png|800px]] || [[image:BW6-009 small.png|300px]] | | 8" || BSPCL-514 || 8A || Ti || [[image:BPSPCL-514_cas.png|800px]] || [[image:BW6-009 small.png|300px]] || | ||
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| Mask || B6025-025 || || Ti || [[image:B6025-025.png|800px]] || (140.000, 120.000) | | Mask || B6025-025 || || Ti || [[image:B6025-025.png|800px]] || (140.000, 120.000) || | ||
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