Specific Process Knowledge/Etch/DRIE-Pegasus/nanoetch/nano13: Difference between revisions
New page: == The nano1.3 recipe == {| border="2" cellpadding="2" cellspacing="1" |+ '''Recipe nano1.3''' |- ! rowspan="6" align="center"| Recipe | Gas | C<sub>4</sub>F<sub>8</sub> 38 sccm, SF<sub>... |
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<gallery caption="The results of the nano1. | <gallery caption="The results of the nano1.3 recipe" widths="250" heights="200" perrow="5"> | ||
image:WF_2E01_mar23_2011_030a.jpg|The 30 nm trenches after 60 secs. | image:WF_2E01_mar23_2011_030a.jpg|The 30 nm trenches after 60 secs. | ||
image:WF_2E01_mar23_2011_060a.jpg|The 60 nm trenches after 60 secs. | image:WF_2E01_mar23_2011_060a.jpg|The 60 nm trenches after 60 secs. | ||