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Specific Process Knowledge/Etch/Etching of Aluminium: Difference between revisions

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*~60-100nm/min
*~60-100nm/min
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*~0.5nm/sec (pure Al)
*~30nm/min (pure Al)
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*~350 nm/min (depending on features size and etch load)  
*~350 nm/min (depending on features size and etch load)  
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